The top 3 songs in each semi-final (chosen by televoting) qualified for the final.
Semi-Final 1 – March 9th
| 1 | Si tous les je t’aime | If all the „I love you’s“ | Jocelyne Jocya | 1143 |
6th |
– |
| 2 | Le jeu de la liberté | The game of freedom | Serge Fouchet |
597 |
7th |
– |
| 3 | On a coupé un arbre | A tree was cut | Michel Démétriadès | 2056 |
4th |
– |
| 4 | Une chanson rose | A pink song | Bee Michelin | 5091 |
2nd |
F |
| 5 | Un enfant de France | A child of France | Frida Boccara | 4722 |
3rd |
F |
| 6 | Ils ont plantés un olivier | They have planted an olive tree | Nadine Douteau | 1441 |
5th |
– |
| 7 | Camarade vigneron | Fellow wine grower | Marcel Amont | 5902 |
1st |
F |
Semi-Final 2 – March 16th
| 1 | Viens dans ma farandole | Come into my farandole | Minouche Barelli | 1705 |
6th |
– |
| 2 | Un jour, un matin | One day, one morning | Chantal Billon | 6107 |
1st |
F |
| 3 | Ni bleu, ni gris | Neither blue nor gray | Parasol | 1919 |
5th |
– |
| 4 | Hé hé m’sieurs dames | Hey hey ladies and gentlemen | Profil | 6049 |
2nd |
F |
| 5 | Dans le regard d’un enfant | In a child’s glance | Simone Langlois | 3094 |
4th |
– |
| 6 | J’suis heureux | I’m happy | Bernard Sauvat | 1493 |
7th |
– |
| 7 | Poète ou musicien | Poet or musician | Anne Delorme | 5803 |
3rd |
F |
Minouche Barelli represented Monaco in ESC 1967.